Low voltage optical switches fabricated by anisotropic wet etching of (110) and (111) silicon wafers

摘要：

A micromechanical optical switch driven by electrostatic force was fabricated by anisotropic wet etching of (110) and tilted 2.5 °angle (111) silicon wafers. The reflective micromirror, the self-aligned fiber grooves and the torsion beam were fabricated on the (110) silicon wafer. The reflective micromirror and the fiber grooves are self-aligned, and the perpendicularity between the micromirror and the optical axis is accurate. The slant counter electrode was fabricated on the tilted 2.5 ° angle (111) silicon wafer which normal is tilted 2.5 °off the <111> direction toward the nearest <110> direction.

关键词： Optical switch (110)silicon wafer Slant counter electrode

作者: Dong Wei Liu Caixia Zhang Xindong Ruan Shengping Zhong Zhicheng Jia Cuiping Zhou Jingran Wang Lijun Chen Weiyou

作者单位: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 13 College of Electronic sciences & Engineering, State Key Laboratory on Integrate Optoelectronics, Jil College of Computer Science and Technology, Jilin University, Changchun 130012 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 13

会议类型: 国际会议

会议名称: The 5th International Conference on Optical Communications and Networks & the 2nd International Symposium on Advances and Trends in Fiber Optics and Applications(第5届国际光通信与网络年会暨第2届纤维光学发展现状与未来趋势国际学术研讨会)

会议地点: 成都

会议语种:英文

页码: 232-236

在线出版日期: 2006-09-18（万方平台首次上网日期，不代表论文的发表时间）