Inline Magnetron Sputtering Equipment with 6000 wph Throughput and Specially Designed Magnetic Field for Soft Deposition of ITO Layers in Silicon Heterojunction Solar Cells

摘要：

Summary GENERIS PVD 6000:Throughput 6000 wph Optimized designs for HJT Maximal degree of freedom in process optimization and upgrade 2017/2018 years of pilot,2019 year of starting GW-scale production!

作者: 张振昊

会议类型: 国内会议

会议名称: 2018 年第十四届中国太阳级硅及光伏发电研讨会

会议地点: 南昌

会议语种:英文

页码: 1-21

在线出版日期: 2018-11-01（万方平台首次上网日期，不代表论文的发表时间）