Investigation on The Microstructure And Performance of NdFeB Thin Films Produced by Sputtering

摘要：

　　By means of sputtering a nanocrystalline NdFeB film was deposited on silicon substrates,and the microstructure and magnetic performance of the films were characterized by X-ray diffraction(XRD),atomic force microscope(AFM)and vibrating sample magnetometer(VSM).Results show that the films have a similar composition to the target and contain a single phase Nd33Fe60B3.The films were composed by particles contained a number of 30-50nm crystal grains.The coercivity,remanence and energy product of the films all reduced with the increase of the deposition time.

关键词： NdFeB thin film Magnetron sputtering Magnetic performance Microstructure

作者: Sun Jianchun Lan Wei Ma Yilong Chen Dengming Liang Jianhua

作者单位: College of Metallurgy and Materials Engineering of Chongqing University of Science and Technology,Chongqing 401331,China

会议类型: 国内会议

会议名称: 2016中国国际表面工程论坛暨重庆第十三届表面工程技术论坛

会议地点: 重庆

会议语种:英文

页码: 49-54

在线出版日期: 2016-05-09（万方平台首次上网日期，不代表论文的发表时间）