Design and Fabrication of Electrostatic Comb-drive Actuator for MEMS Relays with Tilted Beams and Double-stop Finger
Electrostatic comb-drive MEMS relays have attracted numerous efforts of researchers for its advantages of low power,easy fabrication and low actuation voltage.However,Electrostatic comb-drive MEMS relays/switches may suffer from the pull-in effect.Tilted beams can solve the problem,but it can also increasing driving voltage.In the paper,we have developed a lateral electrostatic driven switches where a tilted folded beam and double-stop fingers are utilized.The tilted folded beam can reduce pull-in effect while double-stop fingers can reduce the driving voltage.Tilted beams were found to have a larger restoring force than traditional beams.Measured actuation voltage of designed electrostatic combdrive MEMS relays is 10.2V.
Comb-drive MEMS relays Tilted folded beam Double-stop fimger Low driving voltage
Jin Yue Wang Lifeng Huang Qingan
Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China
国内会议
成都
英文
447-450
2016-10-14（万方平台首次上网日期，不代表论文的发表时间）