Temperature-programmed Multi-capillary Gas Chromatograph Microcolumn for Analysis of Odor Sulfur Pollutants
This paper reports the fabrication and performance of a silicon-on-glass MEMS-based GC eight-capillary column which is 0.5-m long,30-μm wide and 300-μm deep.According to the theory of a gas chromatography column,an even gas flow among different capillaries play a vital role in the peak broadening.Thus,a flow splitter structure is designed by the finite element method through the comparison of the velocity distributions of the eight-capillary columns with and without splitter as well as an open tubular column.The simulation results reveal that eight-capillary column with flow splitter can receive most uniform flow velocity in capillaries,resulting to a highest separation efficiency.The separation experiment results show that the separation efficiency of 22,066 plates/m is achieved with the temperature-programmed chip column coated with SE-54 for analysis of odor sulfur pollutants which is nearly 2 times higher than that of the commercial capillary column coated the same stationary phase.While the separation time of all the components in the microcolumn is less than 3.8 minutes,which is faster than the commercial capillary column.
Micro gas chromatography Separation efficiency Flow splitter Odor sulfur pollutants
Yuan Huan Du Xiaosong Xie Guangzhong Tai Huiling Su Yuanjie Guo Pengfei Xiao Yang
State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China
国内会议
成都
英文
451-456
2016-10-14（万方平台首次上网日期，不代表论文的发表时间）