Industrial Optimalization of Al2O3 Passivation Layers in New Cell Designs:a Comparison between PECVD and ALD

摘要：

Company Levitech BV Founded in 2009 Spin-off of ASM International NV(shareholder) Located in the Netherlands Subsidiaries/agents worldwide ISO-9001/ISO-14001 certified Production outsourced in Netherlands(use of ASML suppliers)

作者: J.Beijersbergen K.Vanormelingen X.Pages V.Kuznetsov E.Granneman

会议类型: 国内会议

会议名称: 第十二届中国太阳级硅及光伏发电研讨会

会议地点: 浙江嘉兴

会议语种:英文

页码: 1-23

在线出版日期: 2016-11-24（万方平台首次上网日期，不代表论文的发表时间）