Development of The Next Generation Mono-crystalline Texture Agents
Outline of Presentation 1,Texturing Mechanism Pyramid formation by ”micro mask theory”2,Features of the next generation texturing Low reflectance(<10 %at 600 nm) High productivity(Short time texturing 2 min~) Highly long run performance(Long life of texture agent) Low amount of waste water Low etching amount High tolerance to surface contamination(Applicable to various wafers)
Seimei Akagi Yoshiteru Kamada Noboru Oyagi Toshinori Saida Yuzo Yamamoto
SETTSU OIL MILL,INC. Japan Industrial Business Development
国内会议
浙江嘉兴
英文
1-25
2016-11-24(万方平台首次上网日期,不代表论文的发表时间)