Advancement in “Direct Solid Sampling” Glow Discharge Mass Spectroscopy (GDMS) for Trace Analysis of Advanced Alloys, Engineering Coatings, Thin Films and Coarse Surfaces
Glow discharge mass spectroscopy(GDMS)is a direct solid sampling technique with growing importance for high sensitivity trace elemental analysis of advanced materials used in aerospace,semiconductor,energy and medical device industries.In this article,several case studies were given,covering the applications in quality control,production support and failure analysis.GDMS is the technique of choice for full survey analysis,in particular monitoring the critical bulk trace impurity in advanced alloys such as S,Se,Pb,etc.,due to its exceptional long-term reproducibility(yearly measurement variation RSD < 10%).The GDMS equipped with a fast flow GD source is also a highly sensitive technique for depth profiling of trace impurities in engineering coatings(up to 100s mm thick)in the direct current mode,and in thin metal oxide film(100s nm thick)in the modulated GD mode.We also demonstrated that this GDMS configuration is also an effective tool for near surface chemical analysis of coarse surfaces.
glow discharge mass spectroscopy trace analysis depth profile alloys engineering coatings
Wang Xinwei Su Kenghsien Liu Yan PUTYERA Karol
EAG,Inc.,103 Commerce Blvd.,Liverpool,New York 13088,U.S.A.
国内会议
上海
英文
1-9
2015-10-21（万方平台首次上网日期，不代表论文的发表时间）