Study on Mechanical Grinding of Large Area Free-standing Diamond Film
Mechanical grinding was applied to fiat the free-standing diamond film deposited by 100 kW high power DC Arc Plasma Jet CVD system.The influences of grinding speed and pressure on the surface morphology, diamond removal rate and diamond removal mechanism were studied by scanning electron microscopy, digimatic micrometer and X-ray photoelectron spectroscopy, respectively.The results showed that speed and pressure had significant effects on the surface morphology and diamond removal rate.While the grinding speed and pressure were 40 r/min and 0.50 MPa respectively, the diamond removal rate could reach 80.5 μm/h.No iron atoms were detected on the surface of the grinded diamond film.The speculated diamond removal mechanism was mainly the combination of micro-cleavage and stress-induced local graphitization.
large area free-standing diamond film mechanical grinding stress-induced local graphitization
Wen Xing-kai Wei Jun-jun Liu Jin-long CHen Liang-xian Hei Li-fu Li Cheng-ming
Institute of Advanced Materials and Technology, University of Science and Technology Beijing
国内会议
第六届郑州国际超硬材料及制品研讨会暨庆祝中国人造金刚石诞生50周年大会
郑州
英文
143-148
2013-11-13（万方平台首次上网日期，不代表论文的发表时间）