Coplanar Capacitive sensor for Measuring Horizontal Displacement in Joule Balance

摘要：

　　This paper describes a coplanar capacitive sensor that was developed for joule balance to measure the horizontal displacement of suspended coil.Three sensors of this type were arranged at 120° intervals around the suspended coil.The structure of the sensor is presented in this paper.Simulation model was built to verify the characteristic of the coplanar capacitive sensor,which gets a sensitivity of about 0.013pf/mm in the range of 1mm,and the residual error is within ±0.0004pf.Experiment indicated that document.this sensor shows the sensitive of 0.012pf/mm with 0.3μm resolution in the range of 1mm.

关键词： Joule balance length metrology alignment capacitive sensor

作者: Yunfeng LU Qing HE Yang BAI Tao ZENG Zhengkun LI Zhonghua ZHANG Jiubin TAN

作者单位: National Institute of Metrology,Beijing,100029,China;Key Laboratory for the Electrical Quantum Stand Harbin Institute of Technology,Harbin,150001,China

会议类型: 国内会议

会议名称: 第十八届中国科协年会

会议地点: 西安

会议语种:英文

页码: 1-4

在线出版日期: 2016-09-01（万方平台首次上网日期，不代表论文的发表时间）