A Film Thermocouple Temperature Sensor Composited By Metal and SiC Based On MEMS
(0) We presents a new type of film thermocouple temperature sensor composited by metal and silicon carbide (SiC) based on micro-electro-mechanical system (MEMS) technology in order to establish temperature testing systems for aero engine turbine under a harsh working environment.The principles of the sensor,such as the Seebeck effect of metal,the heat transfer model and thermal stress in films,were studied and the mechanical model and mathematical solutions were established.The working mechanism and the process were researched to optimize the sensor.The test platform was built to test the performances of the sensor.The experiment shows the sensor has an acceptable linearity up to 1070K with a suitable voltage output and rise time,and the average Seebeck coefficient is 15uv/K.
high temperature sensor MEMS film thermocouple
Zhongkai ZHANG Bian TIAN Chen ZHENG Qijing LIN Na ZHAO Qiuyue YU Zirong WU Zhuangde JIANG
Xi”an Jiaotong University,710054,Xi”an,China
国内会议
西安
英文
1-4
2016-09-01（万方平台首次上网日期，不代表论文的发表时间）