Design and Simulation of MEMS Mirror Based 3D Shape Measurement System
A 3D shape measurement system based on a laser rangefinder and a two-dimensional MEMS mirror is presented in this paper.According to the requirement of surface profile measurement,the 3D shape measurement system is mainly composed of a laser module,a twodimensional MEMS mirror,a ranging module,an orientation module and an image composition module.Based on the MEMS scanning technology and phase-shift ranging method,the surface profile of the target can be acquired by the measurement system.For the coupled scanning mode,the scanning pattern is simulated in Lissajous figure and the condition of covering all the field of view is analyzed.The simulation results show that the 3D shape measurement system based on the laser rangefinder and the two-dimensional MEMS mirror can realize the measurement the surface profile of the target in all the field of view.
MEMS mirror phase-shift method scanning shape measurement
Chi ZHANG
Beijing Institute of Nanoenergy and Nanosystems,Chinese Academy of Sciences,Beijing,China
国内会议
西安
英文
1-5
2016-09-01（万方平台首次上网日期，不代表论文的发表时间）