Deposition and Characterization of TiA1N/A1ON Superhard Nanomultilayered Coatings Prepared by Reactive Magnetron Sputtering
A series of TiAlN/AlONnanomultilayers with different A1ON layer thickness were synthesized by reactive magnetron sputtering.The microstructure and mechanical properties were investigated by X-ray dif fraction (XRD),high-resolution transmission electron microscopy (HRTEM),field emission scanning elec tron microscopy (FESEM) and nano-indentation techniques.The results indicated that,under the template ef fect of fcc (face-centered cubic) TiAlN layers,amorphous A1ON was forced to crystallize and grew epitaxi ally with TiA1N layers when A1ON layer thickness was below 0.7 nm,resulting in the enhancement in hard ness and elastic modulus.With further increase of AlON layer thickness,AlON transformed back into amor phous state and broken the coherent growth of multilayers,leading to the decrease of hardness and elastic modulus.
TiA1N/A1ON nanomultilayer Magnetron sputtering Epitaxial growth Mechanical property Microstructure
Wei LI Ping LIU Juntao WANG Fengcang MA Xinkuan LIU Xiaohong CHEN Daihua HE Jie SUN Shuyun JIANG Yi WANG
School of Materials Science and Engineering,University of Shanghai for Science and Technology,Shanghai,China,200093
国内会议
重庆
英文
1079-1082
2011-11-16（万方平台首次上网日期，不代表论文的发表时间）