Optical and electrical properties of nanocrystalline SnO2:Sb thin films
The SnO2:Sb thin films are prepared by r.f.magnetron sputtering.The films are deposited on α-A12O3 substrates at substrate temperatures ranging from 100 to 400℃.The preferential orientation (110) of films above300℃ is characterized by x-ray diffraction.The surface morphology and grain-like nanostructures of films have been illustrated from the scanning electron microscope images.The absorption spectra show that the energy band Eg decreases with the increasing substrate temperature,due to the increase in oxygen vacancy.The average transmittance in the visible range is over 85%,and that their thresholds increase as the substrate temperature increases.The resistivity is cut down to about4.76× 10-4 Ω·cm.
SnO2:Sb(ATO) R.f.magnetron sputtering Optical properties Electrical properties
Lei Zhang Hong Pan Weiqing Yang
Key Laboratory of Advanced Technologies of Materials(Ministry of Education), School of Materials Science and Engineering,Southwest Jiaotong University, Chengdu 610031, China
国内会议
成都
英文
1-1
2014-11-07（万方平台首次上网日期，不代表论文的发表时间）