A Novel Micro-nano-hybrid Porous Silicon Array for Hybrid-lattice Photonic Crystal Application

摘要：

　　In this study, we present a novel technique for the fabrication of 2D hybrid photonic crystal structures based on ordered porous silicon array.Each unit of the array consists of a centric micro-sized macropore and six surrounding nano-pores.The fabrication process is based on photoelectrochemical etching, combined with steps of oxidation, CMP and TMAH etching.We investigate the absolute photonic band gap in such 2D hybrid photonic crystal composed of triangular and honeycomb lattices.Our results indicate that the photonic band gap is very sensitive to the structure parameters(especially to the diameter of nano-pores), and it can be an effective way to enlarge the absolute photonic band gap by modifying the pore diameters.

作者: D.H.Ge

作者单位: School o f Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China

会议类型: 国内会议

会议名称: 2014年全国博士后新材料技术与应用学术论坛

会议地点: 宁波

会议语种:英文

页码: 494-501

在线出版日期: 2014-11-11（万方平台首次上网日期，不代表论文的发表时间）