3D SIMS-fundamentals,applications and new advances

摘要：

Secondary ion mass spectrometry (SIMS) has become a powerful technique forthe label-free analysis of organics from cells to electronic devices ”1”.Thedevelopment of cluster ion sources has revolutionised the field,increasing thesensitivity for organics by two or three orders of magnitude and for large clusters,such as C60and argon clusters,allowing depth profiling of organics.The latter hasprovided the capability to generate stunning 3dimensional images with depthresolutions of around 5nm,simply unavailable by other techniques.

作者: I S Gilmore

作者单位: National Centre of Excellence in Mass Spectrometry Imaging(NiCE-MSI)National Physical Laboratory,Teddington,Middlesex,UK

会议类型: 国内会议

会议名称: 第五届中国二次离子质谱学会议

会议地点: 北京

会议语种:英文

页码: 5-6

在线出版日期: 2014-10-18（万方平台首次上网日期，不代表论文的发表时间）