SIMS Depth Profiling and 3D characterization of Organic/Inorganic Surfaces by FIB Crater Wall Imaging and Tomography

摘要：

Information on the chemical composition,physical properties and thethree-dimensional structure of materials and devices is of major importance.TOF-SIMS is known to be an extremely sensitive surface imaging technique whichprovides elemental as well as comprehensive molecular information on all types ofsolid surfaces.In the so-called dual beam mode the pulsed analysis beam is combinedwith a low energy sputter ion beam for the removal of material.This allows depthprofiling of multilayers with high depth resolution as well as three-dimensionalanalysis.

作者: S.Kayser F.Kollmer R.M(o)llers D.Rading H.Arlinghaus E.Niehuis

作者单位: ION-TOF GmbH,Heisenbergstr.15,48149 Münster,Germany

会议类型: 国内会议

会议名称: 第五届中国二次离子质谱学会议

会议地点: 北京

会议语种:英文

页码: 67-68

在线出版日期: 2014-10-18（万方平台首次上网日期，不代表论文的发表时间）