Ultra high purity tungsten and its applications

摘要：

Ultra high purity (>99.9999 wt.％) tungsten (W) and its high purity (>99.999 wt.％) alloys are the vital materials for special lighting and semiconductor industries due to its functions on extending the life of lamps,high conductivity,high electron migration resistance,and excellent step coverage performance in semiconductors.In this study,an in-house developed ultra high purity W powder has been employed to fabricate tungsten rods and wires for the special lighting products.In addition,high purity tungsten-titanium (W-Ti) and tungsten-silicon (W-Si) sputtering targets have been developed successfully by using this type of W powder.The process and properties of the resulted materials have been investigated.

关键词： High purity tungsten tungsten-titanium tungsten-silicon sputtering targets

作者: Yang Yu Feng Bai Ailong Zheng Jiupeng Song Fusheng Peng

作者单位: Xiamen Honglu Tungsten Molybdenum Industry Co.Ltd,361021 Xiamen,China

会议类型: 国内会议

会议名称: 2013年全国粉末冶金学术会议及海峡两岸粉末冶金技术研讨会

会议地点: 厦门

会议语种:英文

页码: 1-4

在线出版日期: 2013-11-01（万方平台首次上网日期，不代表论文的发表时间）