FABRICATION OF PZT BY SOL-GEL METHOD

关键词： Lead zirconate titanate sol-gel method spin coating method piezoelectric thin film

作者: Bing-Huei Chen Long Wu Ming-Cheng Chure Yeong-Chin Chen

作者单位: Department of Electrical Engineering, Nan Jeon Institute of Technology, 178 Chau-Chin Road, Yen-Shui Department of Electronics Engineering, Far-East University, 49 Jhonghua Road, Sinshih ,Tainan City, Department of Computer Science & Information Engineering, Asia University, 500, Lioufeng Rd.,Wufeng,

会议类型: 国内会议

会议名称: 2010年全国压电和声波理论及器件技术研讨会

会议地点: 厦门

会议语种:英文

页码: 310-314

在线出版日期: 2010-12-10（万方平台首次上网日期，不代表论文的发表时间）