Effectively improve the yield of LED PSS/PAD Process with new generation stepper
Patterned substrate sapphire (PSS) is widely used in LED industry as it improves GaN epitaxial crystal quality and increases LED’s light extraction efficiency.This process requires vertical sidewall angel,high uniformity of pattern diameter,and high precision field-to-field stitching.With past patterning solution by using traditional exposure tools,PSS yield is only 70%-80% in mass production.Now SSB300 HB-LED stepper achieves PSS yield better than 95% and significantly reduces PSS manufacturing rework cost with adoption of the best CD/DOF strategy,seamless stitching and mapping vertical controlling technology etc.Meanwhile,to meet increasing demand of PAD finger technology,SSB300 stepper deploys high precision MVS alignment technology and realizes 1μm resolution CD and 200nm overlay in the PAD process.Also,SSB300 provides VS (Viable Slit) module to matching the Aligner,thus the Aligner marks will be kept and no other chips will be wasted.
国内会议
宜昌
英文
1-4
2014-05-15（万方平台首次上网日期，不代表论文的发表时间）