Effect of substrate temperature on Microstructure and Property of TiN film deposited by multi-arcion plating
This paper studied the microstructure and properties of TiN films were deposited by multi-arc ion plating with different substrate temperature.The surface morphology of TiN films was investigated by SEM, the phase structure was investigated by XRD, the adhesion strength of the films was measured by automatic scratch tester.The results show that: when the substrate temperature is low, the surface of films is loose, with the substrate temperature increases, the surface of films become compact, the crystal grain begin grow up, the TiN film is facial central cubic structure, and exhibits preferential orientation of the film is (111) plane under the different substrate temperature.when the substrate temperature increases, the adhesion strength of the films increased, the maximum adhesion strength of the films is 53N as the substrate temperature is 300℃.
temperature TiN film adhesion strength
Yan Zhang Yuan Gao Wei Qin Wu Cheng Lei Wang
School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China
国内会议
西安
英文
159-164
2013-10-25（万方平台首次上网日期，不代表论文的发表时间）