A New MOCVD Platform, Prismo D-Blue TM, for High-throughput GaN LED Production

摘要：

　　A new MOCVD platform,the Prismo D-BlueTM,was designed and manufactured at Advanced Micro- Fabrication Equipment Inc.(AMEC) for high-volume manufacturing of high-brightness Light Emitting Diodes (LEDs).The long- term process stability and repeatability were investigated and demonstrated.Based on a welltuned laminar gas flow condition and very stable temperature control system using dual-wavelength pyrometer sensors,more than 52 LED production runs with repeated chip performance were achieved.The LED quick test data of LED brightness,wavelength and ESD show excellent repeatability for AMEC’s Prismo DBlueTM System.In addition,various graphite susceptor designs for 4” sapphire substrates were also investigated for good wafer uniformity.With different pocket depth for inner-ring and outer-ring,good susceptor (14×4” LED wafers) wavelength uniformity of <1.6 nm was achieved.

作者: Quanyong Guo Jason Hoo Yasushi Iyechika Lion Wang Yingbin Liu Shiping Guo Zhiyou Du

作者单位: Advanced Micro-Fabrication Equipment Inc.(AMEC)188 Taihua Road,Shanghai 201201,China

会议类型: 国内会议

会议名称: 第十届中国国际半导体照明论坛

会议地点: 北京

会议语种:英文

页码: 4-7

在线出版日期: 2013-11-10（万方平台首次上网日期，不代表论文的发表时间）