Picosecond laser machining of deep holes in silicon infiltrated silicon carbide ceramics

摘要：

　　Silicon infiltrated silicon carbide (Si-SiC) ceramics,as a high hardness material,are difficult to machine,especially drilling micro-holes.In this study,interaction of intense picosecond laser pulses (1 ps at 1030 nm) with Si-SiC ceramics had been investigated.Variations of the diameters and depths of circular holes with the growth of the laser energy density were obtained.The results indicate that the increase of machining depth follows a nonlinear relation with the increasing of laser energy density,while the diameter has little change with that.Moreover,it is found that some debris and particles are deposited around and inside the holes and waviness is in the entrance and at walls of the holes after laser processing.

关键词： Picosecond laser deep holes silicon infiltrated silicon carbide ceramic

作者: Qing Zhang Chunhui Wang Yongsheng Liu Litong Zhang Guanghua Cheng

作者单位: Science and Technology on Thermostructure Composite Materials Laboratory,Northwestern Polytechnical State Key Laboratory of Transient Optics,Xi”an Institute of Optics and Precision Mechanics,Chinese A

会议类型: 国内会议

会议名称: 第一届中国国际复合材料科技大会

会议地点: 北京

会议语种:英文

页码: 67-74

在线出版日期: 2013-09-10（万方平台首次上网日期，不代表论文的发表时间）