Effects of CeO2/YSZ buffer layer and oxygen pressure on the properties of Ni-Mn-Zn ferrite films
Ni-Mn-Zn ferrite films were prepared on silicon substrate with CeO2/YSZ (YSZ:yttria-stabilized ZrO2) as buffer layer by pulsed laser deposition.The effects of CeO2/YSZ buffer layer and oxygen pressure on the microstructures and magnetic properties of films were studied.It was shown that the CeO2/YSZ buffer layer could greatly improve the crystallization of the film.The film crystallinity, microstructure and soft magnetic properties were sensitive to the oxygen pressure.High quality film with preferred (311) orientation, uniform surface structure, high purity and excellent soft magnetic properties can be obtained at the oxygen pressure of 1 Pa.The saturation magnetization (Ms) is higher than 230 emu/cm3 with a coercivity (Hc) smaller than 30 Oe, which is suitable to be used in high-frequency devices.
Ferrite film CeO2/YSZ soft magnetic material
H.Zheng M.G.Han J.X.Deng P.Zheng L.Zheng H.B.Qin L.J.Deng
School of Microelectronics and Solid State Electronics,University of Science and Technology of China Institute of Electron Device & Application,Hangzhou Dianzi University,Hangzhou 310018,People”s Repub
国内会议
成都
英文
295-301
2013-11-15（万方平台首次上网日期，不代表论文的发表时间）