Dynamic reel-to-reel fast deposition of Y2O3 seed layers for YBCO coated conductors
Y2O3 films were epitaxial grown on biaxially textured Ni-5at.%W substrate by direct-current (DC) magnetron reactive sputtering using dynamic reel-to-reel system.Detailed deposition conditions of Y2O3 seed layers were studied.The best samples deposited on optimization condition showed pure c-axis orientation.Full width at half maximum (FWHM) values of in-plane and out-of-plane for Y2O3 films were 4.3° and 3.5°, respectively.Atomic force microscope (AFM) reveals smooth surface with Root-mean-square roughness (RMS) lower than 5nm.High textured YBCO film、 YSZ barrier layers and CeO2 cap layers were deposited on Y2O3 seed layers using DC sputtering.The critical current density (Jc) of YBCO film on CeO2/YSZ/Y2O3 buffered Ni-W tapes was 1.3MA/cm2.
Y2O3 seed layers dynamic reel-to-reel system reactive sputtering critical current density
Yan Xue Jie Xiong Yu-Dong Xia Fei Zhang Xiao-Hui Zhao Bo-Wan Tao
State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,PR China
国内会议
成都
英文
302-305
2013-11-15（万方平台首次上网日期，不代表论文的发表时间）