Effect of Rapid Thermal Annealing On the Properties of BaTiO3 Thin Films On Polycrystalline Ni Substrate Grown By Polymer Assisted Depositio
Ferroelectric BaTiO3 (BTO) thin films on polycrystalline nickel (Ni) substrates with good dielectric, ferroelectric, piezoelectric properties and magnetoelectric coupling, show great potential in many applications.However, deposition of oxide thin films on base-metallic substrates generally suffers from the serious oxidation between films and substrates.It is demonstrated that BTO thin films can be successfully deposited on Ni foils by a chemical solution technique named μolymer assisted deposition (PAD).It is found that a rapid thermal annealing (RTA) in oxygen would affect the properties of thin films.Dielectric and ferroelectric properties have been systematically studied.The correlation among the RTA conditions, and leakage current densities was established.Mechanisms of the formation of leakage current and the impact from oxygen vacancies will be discussed.The results suggest that the PAD technique can be utilized on the fabrication of ferroelectric films on base-metallic substrates.
Polymer assisted deposition rapid thermal annealing BTO leakage current
Du Hui Liang Weizheng Li Yang Gao Min Zhang Yin Chen Chonglin Lin Yuan
School of Microelectronics and Solid State Electronics,University of Science and Technology of China Department of Physics and Astronomy,University of Texas at San Antonio,San Antonio,Texas 78249,Unite
国内会议
成都
英文
350-355
2013-11-15（万方平台首次上网日期，不代表论文的发表时间）