Structures and tribological performances of ultrathin diamond-like carbon films prepared by plasma-based ion implantation
Ultrathin diamond-like carbon (DLC) films with thickness of 5-60nm have been prepared on Si by plasma-based ion implantation (PBⅡ).Raman sPectrum and X-ray photoelectron spectroscopy (XPS) show that these DLC films present high sp3/sp2 ratios.XPS also displays that each DLC film firmly adheres to Si substrate owing to a C-Si transition layer.Atomic force microscope.(AFM) exhibits that the DLC films are smooth andcompact with average roughness (Ra) of about 0.25nm.Sliding friction experiments reveal that these DLC films have significantly improved tribologieal performances.With the DLC film thickness increase, the sp3/sp2 ratio increases, the roughness decreases, the hardness increases, the adhesive wear lightens, and thereby the tribological performances enhance.Also, the effects of the applied 1oad and the reciprocating frequency on the tribologieal performances have been discussed.
ultrathin diamond-like carbon films plasma-based ion implantation tribological performance.
Liao Jia-xuan Li En-qiu Tian Zhong Pan Xiao-feng Xu Jiang Jin Long Yang Hai-guang
Research Institute of Electronic Science and Technology,University of Electronic Science and Technology of China.Chengdu 610054,China
国内会议
成都
英文
223-232
2007-12-01（万方平台首次上网日期，不代表论文的发表时间）