Industrial solution for the passivation of n-type cells:ALD Al2O3

摘要：

　　Levitrack is an in-line mass production ALD system for surface passivation.A Si wafer receives one saturated layer of AlOx in one thermal ALD cycle depending on deposition temperature (~0.12 nm at 2000C).ALD aluminum oxide ensures excellent Si surface passivation due to minimization of interface density (Dit) and its high negative surface charge density (Qf).In the PV sector AlOx is widely applied for p-type Si solar cells as a rear dielectric.Its passivation quality was independently demonstrated by several groups ”1”,”2”,”3”,”4”.Recently it has also been shown that n-type cells with p+ emitters can be effectively passivated by Al2O3 ”5”,”6”.

作者: O.Siarheyeva E. Granneman P. Vermont D.S. Oosterling-Saynova I.G. Romijn

作者单位: Levitech BV, Versterkerstraat 10, 1322 AP Almere, The Netherlands ECN Solar Energy, P.O. Box 1, .1755 ZG Petten, The Netherlands

会议类型: 国内会议

会议名称: 第八届中国太阳级硅及光伏发电研讨会

会议地点: 上海

会议语种:英文

页码: 1-1

在线出版日期: 2012-12-06（万方平台首次上网日期，不代表论文的发表时间）