Advanced materials characterization using grazing incidence X-ray spectrometry

摘要：

The further development and efficient use of advanced materials innanoelectronics and photovoltaics require reliable information on the elementalcomposition and binding states of these materials that can be revealed by X-RaySpectrometry (XRS)，a wide spread non-destructive analytical technique．Reference-free quantification in XRS relies on both the instrumental and fundamentalatomic parameters”1，2】，and the knowledge of these parameters can be improved bymetrology using synchrotron radiation【3】．

作者: Burkhard Beckhoff

作者单位: Physikalisch-Technische Bundesanstalt,Abbestr．2-12,10587 Berlin,Germany

会议类型: 国内会议

会议名称: 第九全国X射线光谱学术报告会

会议地点: 南宁

会议语种:英文

页码: 7-8

在线出版日期: 1900-01-01（万方平台首次上网日期，不代表论文的发表时间）