Research and Application of Micro-nano Thin Films Generated by Ion Beam Assisted Deposition (IBAD)

摘要：

　　Research and Application of Micro-nano Thin Films Generated by Ion Beam Assisted Deposition (IBAD)Jinsheng Liu.This paper from the following aspects were introduced:1. Important research achievement;2. The main theoretical monographs;3. Publications.such asa. Ion Beam Technology and Applications (1995);b. Ion Beam Deposition of Thin Films and Applications (2003);c. Thin Film Formation Process and Structure (2005);d. Introduction to the characteristics of hard amorphous carbon (2007).

关键词： 纳米薄膜 理论专著 研究成果

作者: Jinsheng Liu

作者单位: Researcher of Beijing institute of advanced ion beam technology

会议类型: 国内会议

会议名称: 2011传感器与MEMS技术产业化国际研讨会

会议地点: 苏州

会议语种:英文

页码: 1-2

在线出版日期: 2011-10-27（万方平台首次上网日期，不代表论文的发表时间）