Large area nano manufacturing technologies for industries

摘要：

　　The most important question is how to fabricate the nano-structures and replicate the structures on the large substrates or films with low cost？ The new micro-nano manufacturing systems have been introduced either for the research work, or for the industrial applications, including UV laser interference lithographic systems for the nano-patterning, such as the photonic crystals with the period of 400nm一SOOnm on the large size substrates，up to40”, the roll-to roll nano imprinting systems.

关键词： 纳米制造系统 工业应用 电影设备 商业市场

作者: Chen Linsen Shen Su

作者单位: SVG Optronics,Co. Suzhou, China

会议类型: 国内会议

会议名称: 2011传感器与MEMS技术产业化国际研讨会

会议地点: 苏州

会议语种:英文

页码: 1-37

在线出版日期: 2011-10-27（万方平台首次上网日期，不代表论文的发表时间）