Large area nano manufacturing technologies for industries
The most important question is how to fabricate the nano-structures and replicate the structures on the large substrates or films with low cost？ The new micro-nano manufacturing systems have been introduced either for the research work, or for the industrial applications, including UV laser interference lithographic systems for the nano-patterning, such as the photonic crystals with the period of 400nm一SOOnm on the large size substrates，up to40”, the roll-to roll nano imprinting systems.
纳米制造系统 工业应用 电影设备 商业市场
Chen Linsen Shen Su
SVG Optronics,Co. Suzhou, China
国内会议
苏州
英文
1-37
2011-10-27（万方平台首次上网日期，不代表论文的发表时间）