One-year progress of MEMS hands-on access facility at Tohoku University
The ”Hands-on access fab” is a 4” and 6” facility that companies can easily access and utilize for their prototyping. The fab is shared with other users and managed with best efforts. The fab will not make contract development like MEMS foundry. Companies which have not own facility can dispatch their people to operate equipments by themselves. More than 20 companies have used the fab since the opening in November 2011. The fab targets to make barriers of MEMS development smaller.
微机电系统铸造 操作设备 企业管理
Kentaro Totsu
Innovative R&D Division, Micro System Integration Center, Tohoku University
国内会议
苏州
英文
1-11
2011-10-27（万方平台首次上网日期，不代表论文的发表时间）