CMORE MEMS technologies for monolithic integration on CMOS

摘要：

　　Recent development of MEMS technologies at IMEC enables the monolithic integration of MEMS on CMOS. This approach represents a potential key advantage for a variety of MEMS systems as it can lead to a device performance improvement and to the scaling of the system area with consequent cost and package size reduction. Systems requiring multiple MEMS devices on chip or large MEMS array will benefit the most out of this approach.

关键词： 微机电系统 性能改进 多传感应用 程序开发

作者: Simone Severi

作者单位: MEMS integration group of IMEC Belgium

会议类型: 国内会议

会议名称: 2011传感器与MEMS技术产业化国际研讨会

会议地点: 苏州

会议语种:英文

页码: 1-19

在线出版日期: 2011-10-27（万方平台首次上网日期，不代表论文的发表时间）