Research on the Technology of Calibrating the Optical Spherical Figure Measurement
The laser phase shifting interferometers are mostly used in optical figure measurement，they all use standard transmission lens to produce reference spherical wavefront，but the wave aberration of standard spherical lens itself can”t be completely eliminated due to the restrictions on optical fabrication and assembly，this makes the measurement uncertainty of spherical figure can only reach to λ/10 rms (λ=632.8nm).The key to improve the measurement accuracy is to produce high quality reference spherical wavefront. Point diffraction is a fundamental process that permits the generation of nearly perfect spherical wavefront over a specific numerical aperture This paper introduces a method of fiber phase shifting point diffraction interferometry (FPS/PDI) to calibrate the optical spherical figure measurement. By using the high quality reference spherical wavefront diffracting from the tip of single mode optical fiber ( the deviation of the diffracted wavefront from spherical is less than λ/10,000)，This method can get very high measurement precision based on the phase shifting technology.Analysis reveals that the FPS/PDI is hopeful to improve the measurement precision of spherical figure by 10 times comparing with the normal interferometry，thus the FPS/PDI is capable of constructing as the measurement standard for spherical figure.
spherical figure Technology of Calibrating point diffraction phase shifting interferometry
CHEN Ling-feng SHA Ding-guo LIN Jia-ming ZHOU Tao-geng
Optical Measurement Lab,Dept of Optical Engineering,Beijing Institute of Technology,Beijing 100081,China
国内会议
北京
英文
228-233
2007-09-05（万方平台首次上网日期，不代表论文的发表时间）