Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition
The tetrahedral amorphous carbon films are attracting materials because of their properties similar to diamond,such as high hardness, resistivity,optical transparency, chemical inertness and low coefficient of friction. These properties make it i-deal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties adhesion and wear resistance of the tetrahedral amorphous carbon films deposited on silicon, Crl8Ni9 stainless steel and high speed steel and M2 steel substrate by pulsed and direct current filtered catholic vacuum arc deposition system have been investigated. The high quality tetrahedral amorphous carbon film has been obtained. The hardness and elastic modulus of the tetrahedral amorphous carbon films higher than 78Gpa and 435Gpa respectively determined by nano indentation tests. The friction performance of the tetrahedral amorphous carbon films was also studied by SRV tests, the results show ; the tetrahedral amorphous carbon films have much lower wear coefficient and wear rate than that of silicon,stainless steel and high speed steel substrate.
非晶碳 碳薄膜 真空电弧沉积 化学惰性 摩擦系数
Zhang Xu Wu Xiangying Zhang Huixing Zhang Tonghe
北京师范大学低能核物理研究所，100875 Beijing Radiation Center,Beijing, 100875,China
国内会议
北京市纪念中国博士后制度实施二十周年——首都现代制造技术发展论坛
北京
英文
109-117
2005-09-22（万方平台首次上网日期，不代表论文的发表时间）