Parallel Application of Multiple Optical Inspection Algorithms A Statistical Analysis of Detection Ability
The performance of automated optical inspection (AOI) systems is constantly progressing toward the ultimate goal of detecting 100％ of real defects with no false alarms. Still, until this goal is reached, there is an inherent trade-off in every detection algorithm between detection ability and false alarms.This paper examines the statistical basis of applying several algorithms simultaneously as a method of increasing detection ability and reducing false alarms. It analyzes the probabilities of missing a defect as a function of the number of algorithms and the individual detection probabilities.The theoretical analysis is followed by a discussion of practical implementation of complementing algorithm types and examples of their detection capabilities for typical defects.The theoretical analysis is followed by a discussion of practical implementation of complementing algorithm types and examples of their detection capabilities for typical defects.
光学检测 互补算法 检测性能 缺陷检测
Udi Efrat 杨剑宏 Nir Dery
Camtek Ltd.Migdal Ha”Emek.ISRAEL
国内会议
上海
英文
384-389
2004-03-08（万方平台首次上网日期，不代表论文的发表时间）