Semiconductor Manufacturing Equipment for the 90 nm Node and Beyond
It is essential to continuously pursue finer pattern size to create ”value added” in the semiconductor industry. At the same time, obstacles to making advanced semiconductor devices consistently mount up. Semiconductor devices at the 90nm node and beyond, which have already hurdled the big brick wall of the 100nm node, are becoming more and more integrated and systematized a-long with the finer pattern. This trend accompanies many new issues for manufacturing technologies. This presentation addresses these issues and practical solutions from the standpoint of Tokyo Seimitsu, as the most advanced semiconductor manufacturing equipment vendor.
半导体行业 器件安装 半导体器件 纳米节点
国内会议
上海
英文
5-7
2004-09-01（万方平台首次上网日期，不代表论文的发表时间）