以脈衝式兆赫輻射時域法實現未知折射率樣品之厚度量測
THz time domain spectroscopy often faces a trouble of sample thickness measurement. The thickness measurement often has drawback of physical pressure to affect the real thickness and induce the thickness uncertainty especially for the soft or un-flat sample. In this paper, we compare transmission and reflection of THz waveforms with reference. From very simple calculations, the sample thickness of measured region is determined by the time difference of peak between reference and transmitted THz radiation waveform. Measurement limitation induced thickness uncertainty of system is also discussed. This method is also suitable for on-line large area thickness and uniformity monitor for semiconductors with unknown or not uniform refractive index.
厚度量测 脉冲式 辐射时域法 未知折射率
劉子安
Center for Measurement Standards, Industrial Technology Research Institute 321, Section 2, Kuang Fu Road, Hsinchu 300, Taiwan
国内会议
台北
中文
54-59
2007-01-11（万方平台首次上网日期，不代表论文的发表时间）