SAMPLE DESIGN IN RESONANT ULTRASOUND SPECTROSCOPY FOR MEASURING MATERIAL CONSTANTS OF ScAlN PIEZOELECTRIC FILM

摘要：

Soon after Akiyama et al.demonstrates that Sc-doped aluminum nitride (ScAlN) thin film exhibits extraordinary strong piezoelectricity,the investigation on the full set of material constants of ScAlN film have drawn much attention.The classical measurements of the resonating frequency or the plane-wave velocities require a series of measurements on samples with different geometries,which possibly results in non-self-consistent material constants.The resonant ultrasound spectroscopy (RUS) method can determine full material constants of bulk materials using only one sample.But for the film sputtered on a certain substrate,some elastic constants like C33 and C44 are not sensitive to any resonant frequencies.In this paper,a new method for sample preparation is proposed to construct some new resonant modes related to C33 and C44.

关键词： ScAlN thin film Material constants Resonant Ultrasound Spectroscopy Sample design

作者: Shu-liu WEI Yue HU Xin MIAO Tao HAN

作者单位: Shanghai Jiao Tong University, Shanghai, 200240, P.R. China

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 265-268

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）