A Micro Static Fourier Transform Spectrometer Based on MOEMS Technology
Nowadays, Fourier transform spectrometer has been an indispensable instrument widely used in many field. But the modulation mode of most actual FTS is time modulation. It gets the interferogram through a driving system that pushes the moving mirror to scan the optical path difference (OPD). The high-precision driving system decreases the instrumental stability; it increases the size and the mass of the FTS as well. At the same time, due to the limit of the application environment, the micro stable FTS becomes the exigent requirement in some high and new technology field, such as space detection, environmental monitoring, security inspection and meteorological observation, and so on. In this paper, a new-style micro FTS which was modulated by stepped mirrors was advanced. The principle diagram was shown in Fig. 1.
Jin-guang Lv Jing-qiu Liang Zhong-zhu Liang
State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics, Ch State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, C
国际会议
1st International Conference on Frontiers of Laser Processing(第一届激光加工前沿国际会议 ICFL 2011)
长春
英文
85-86
2011-07-11（万方平台首次上网日期，不代表论文的发表时间）