Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device
We describe a nanometer-scale manipulatoion and cutting method using ultrasonic oscillation scratching. The system is based on a modified atomic force microscope (AFM) coupled with a haptic device as a human interface. By handling the haptic device, the operator can directly move the AFM probe to manipulate nanometer scale objects and cut a surface while feeling the reaction from the surface in his or her fingers. As for manipulation using the system, nanometer-scale spheres were controllably moved by feeling the sensation of the AFM probe touching the spheres. As for cutting performance, the samples were prepared on an AT-cut quartz crystal resonator (QCR) set on an AFM sample holder. The QCR oscillates at its resonance frequency (9 MHz) with an amplitude of a few nanometers. Thus it is possible to cut the sample surface smoothly by the interaction between the AFM probe and the oscillating surface, even when the samples are viscoelastics such as polymers and biological samples. The ultrasonic nano-manipulation and cutting system would be a very useful and effective tool in the fields of nanometer-scale engineering and biological sciences.
atomic force microscope nanofabrication haptic device scratching
F. Iwata S. Kawanishi A. Sasaki H. Aoyama T. Ushiki
Shizuoka University, 3-5-1, Johoku, Hamamatsu, 432-8561, Japan Department of Mechanical Engineering and Intelligent Systems, University of Electro-Communications, Division of Microscopic Anatomy, Graduate School of Medical and Dental Scinences, Niigata University
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-7
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）