The Study of Microstructure and Mechanical Property of CVD MT-Ti(C,N)Coating with Different C/N Ratio
Thin films of MT-Ti(C,N)with different nitrogen and carbon contents were prepared on cemented carbide substrates using the chemical vapour deposition.It was found that carbon sources had the decisive effect on the ratio of C/N,and the microstructure of MT-Ti(C,N)varied with the ratio of C/N,which was analysed by SEM,TEM and EDS.The results showed that C2H4 gas could help to increase the ratio of C/N compared to mono CH3CN,and when the ratio of C/N increased,the grain size of MT-Ti(C,N)decreased in these gases systems.Corresponding changes in nanohardness,elastic modulus and coating adhesion had been measured by nano-indentation and scratch test.It was also shown that ratio of C/N played an important role in the scratch resistance and nanohardness.
CVD MT-Ti(C,N) Microstructure Adhesion Nanohardness
Zhuang Limin Zou Lingli Zheng Qingping Chen Yicong
Xiamen Golden Egret Special Alloy Co.,Ltd.,Xiamen 361006,China
国际会议
北京
英文
1304-1309
2018-09-16（万方平台首次上网日期，不代表论文的发表时间）