The Effect of Titanium Content on the Microstructure and Property of Mo-Ti Alloy
The demand for the molybdenum-titanium(Mo-Ti)alloy sputtering target increases with the rapid development of the flat panel display industry and photovohaic industry.In the present work,the Mo-Ti alloys were fabricated by the hot pressing technique,using the commercially available titanium powder and molybdenum powder as raw materials.Hot pressed at 1600 oC and under an axial pressure of 40 MPa for 3 hrs,Mo-Ti alloys with different chemical compositions were prepared.The effect of titanium content on the mechanical property and microstructure of the prepared Mo-Ti alloys was studied.Results show that the Mo-Ti solid solution was formed and has a brittle feature.As the titanium content increases from 10 atm.%to 50 atm.%,the Rockwell hardness increases from 22.3 HRC to 45.5 HRC,the bending strength increases from 396 MPa to 680 MPa,and the relative density increases from 95%to 98.7%.With the increasing of Ti content,the grain size increases from about 7μm to 15μm,and the amount of pores decreases.The fracture type of Mo-50%Ti is cleavage fracture,while the alloys with lower Ti content are intergranular fracture.XRD results show that the alloy only presents the peak of molybdenum,without the peak of titanium.With the increase of Ti content,the peak shift to the lower angle,indicating that the lattice constant becomes larger.In summary,Ti has a solid solution strengthening effect on the Mo-Ti alloy.
Molybdenum-titanium alloy Powder metallurgy Target material Hot pressing
Niu Xuanyang Zhang Pengfei Zhang Guanglei Fan Yichang Wang Guangxin
School of Materials Science and Engineering,Henan University of Science and Technology,Luoyang 471023,China
国际会议
北京
英文
946-950
2018-09-16（万方平台首次上网日期，不代表论文的发表时间）