Growth of Grass Like Architectures on Si Substrate and Its Mechanism Study

摘要：

　　Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

关键词： Grass like architectures Thermal oxidation Nickel catalyst Compressive stress

作者: Lijiao Hu Yang Ju Hosoi Atsushi

作者单位: Department of Mechanical Science and Engineering,Nagoya University,Nagoya 464-8603,Japan

会议类型: 国际会议

会议名称: 第13届国际断裂大会(ICF2013)

会议地点: 北京

会议语种:英文

页码: 1-5

在线出版日期: 2013-06-16（万方平台首次上网日期，不代表论文的发表时间）