MEMS stiction:contact mechanics and fracture mechanics approaches
Adhesive force between two solid surfaces can lead to stiction failure of the micro-electromechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers.
MEMS stiction arc-shape S-shape
Yin Zhang Ya-pu Zhao
State Key Laboratory of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing 100190,China
国际会议
北京
英文
1-1
2013-06-16（万方平台首次上网日期，不代表论文的发表时间）