Study of TiN Film Adhesion Strength by Pulsed-Laser Shock Detection Method
Bonding strength of the interface of film-substratum is an important factor and key problem that influence the reliability and usage of film-substratum system.The new technology of pulsed-laser shock detection method which analyzes the mechanism and mathematical model of film separation under the action of pulsed-laser shock,.With the example of measuring the adhesion strength of TiN/SKD11 film system,the surface was respectively impacted with pulsed-laser at the range of 650~1000mJ.To observe the surface topography of Impact points by scanning electron microscope,and to identify TiN film failure threshold by the reflected signal detection.By analyzing the experimental result,it was suggested that film/substrate interfacial adhesion strength was 4.954GW/cm2.
pulse laser adhesion TiN film plasma
Binbin Yu Juntang Yuan
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China
国际会议
香港
英文
372-377
2012-12-11（万方平台首次上网日期，不代表论文的发表时间）