Characterization Model for IC Reference Material

摘要：

　　Not all of the measurement data of IC (Integrated Circuit) reference material are valid,so some work would be do to eliminate the null and wrong ones.This paper presents an algorithmic model of the characterization for IC reference material,which can help choose the valid data for the property value validated of IC reference material.The experimentation results of the characterization procedure are detailed in the paper,which proves to be helpful steps to IC reference material characterization and preparation.

关键词： Characterization technology Integrated circuit reference material Algorithmic model

作者: Ting Zhang Jian Shi

作者单位: Wuhan Digital Engineering Institute, Wuhan, 430074, China

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 735-739

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）