Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices
This special collection covers:1.the technology of semiconductor-on-insulator structures and devices; 2.the physics of new SOl devices; 3.SOl sensors and MEMS; 4.nanodots,nanowires and nanofilms.The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators,a-SiC-on-Si oxide,graphite inner films fabricated by ion implantation,and others.The second part presents new devices based upon impact ionization near to the source junction,the modeling of charge transport in nano-scale SOl MOSFETs,the electrical properties of SOI MOSFETs with LaLuO3 high-k gate dielectric and the study of neutron effects upon the behavior of nanometer-scale SOl devices.The third part considers various types of SOI sensors and MEMS,together with their characteristics and applications.The fourth part describes the fabrication and properties of quantum-dimensional structures such as nanowires and nanodots.This book will therefore be useful to a wide readership.
Semiconductor nanomaterials devices sensors
Eds.Aiexei N.Nazarov Jean-Pierre Raskin
国际会议
台湾
英文
1675-1675
2011-12-11（万方平台首次上网日期，不代表论文的发表时间）