The effect of Si content on the performance of magnetron sputtering Hf-Si-N films
In this research a series of Hf-Si-N composite films with different Si contents are prepared by magnetron sputtering on titanium alloy surface. The element valences of the films are studied by using of X-ray photoelectron spectroscopy (XPS). The tribological property, nano-mechanical performance, biocompatibility of the films is examined through ball-on-disk tester, nano-mechanical test system and platelet adhesion experiment, respectively, and the effect of Si contents on the performance is investigated. The results show that the Hf-Si-N film has good wear resistance, nano-mechanical properties and biocompatibility. The film is mainly composed of HfN and Si3N4. Its nano-hardness first increases then decreases along with the addition of Si and the film achieves the maximum hardness and the minimum friction coefficient when the content of Si is 6.99 at ％.
Hf-Si-N films tribolgical property nano-mechanical performance biocompatibility
Xiufang Cui Guo Jin Jinlong Hao Jinna Liu Haidou Wang Binshi Xu
School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, National Key Laboratory for Remanufacturing, Armored Forces Engineering Institute, Beijing 100072, C
国际会议
北京
英文
774-777
2012-10-23（万方平台首次上网日期，不代表论文的发表时间）