The effects of anneal on the mechanical properties and corrosion resistance of NbN Films
In this study, the NbN and Nb films are prepared by radio frequency (RF) magnetron sputtering. The films are annealing treated at 300 ℃ and 400 ℃, respectively, and the influences of annealing process on the morphology, chemical composition, structure, nano-mechanical properties and corrosion resistance of the films are analyzed. The results show that the particles in the film are in nanoscale. The particles in the Nb films are thin and small with the shape of polygon, while the particles in the NbN films prepared under the same condition are pebble-like, larger, and more compact than that in the Nb films. The crystallinity of the both types of films decreases after annealing. The higher the annealing temperature is the lower the crystallinity is, presenting amorphous structure. The nano-mechanical properties and corrosion resistance of the films are improved apparently after anneal. The corrosion resistance and mechanical properties of NbN are always better than that of Nb film. This article also discusses the corresponding mechanism from the perspective of structural evolution.
NbN films anneal mechanical performance corrosion resistance microstructure
Guo Jin Xiufang Cui Tianshi Guo Erbao Liu Tianmin Shao
School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
国际会议
北京
英文
778-780
2012-10-23（万方平台首次上网日期，不代表论文的发表时间）